Modeling and Simulation of Gas-Damped Electrostatic Actuators of MEMS Devices

Plander, I., Štepanovský, M.

PLANDER, I. and M. ŠTEPANOVSKÝ. Modeling and Simulation of Gas-Damped Electrostatic Actuators of MEMS Devices. In: Proceedings of the 13th World Multi-Conference on Systemics, Cybernetics and Informatics. The 13th World Multi-Conference on Systemics, Cybernetics and Informatics, Orlando, 2009-07-10/2009-07-13. Orlando, Florida: International Institute of Informatics and Systemics, 2009. p. 251-256. ISBN 978-1-934272-61-9.