Gas-damped double-gimbaled electrostatic torsional micromirror modeling and simulation

Plander, I., Štepanovský, M.

PLANDER, I. and M. ŠTEPANOVSKÝ. Gas-damped double-gimbaled electrostatic torsional micromirror modeling and simulation. Simulation Modelling Practice and Theory. 2012, 20(1), 59-69. ISSN 1569-190X. DOI 10.1016/j.simpat.2011.08.010.

URL: http://www.sciencedirect.com/science/article/pii/S1569190X11001444